Low resisitivity transparent electrodes for displays on polymer substrates

被引：200

作者：

Fahland, M ^{[1
]}

Karlsson, P ^{[1
]}

Charton, C ^{[1
]}

机构：

[1] FEP, Fraunhofer Inst Electron Beam & Plasma Technol, D-01277 Dresden, Germany

来源：

THIN SOLID FILMS | 2001年 / 392卷 / 02期

关键词：

sputtering; indium-tin-oxide; silver;

D O I：

10.1016/S0040-6090(01)01053-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

One of the main difficulties for manufacturing displays on polymer substrates is the deposition of low resistivity indium tin oxide (ITO). Most polymer materials do not withstand substrate temperatures above 200 degreesC, which are required for conventional high quality ITO process on glass substrates. This is the reason why a solution is proposed which includes the substitution of a single ITO layer by a three layer system consisting of ITO/Ag/ITO. A sheet resistance below 16 Omega/rectangle at a transmittance over 80% at a 550-nm wavelength could be achieved. Additionally, the overall indium content in the coating is reduced. This will lead to a reduction of target costs during production. (C) 2001 Elsevier Science B.V, All rights reserved.

引用

页码：334 / 337

页数：4

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