Preparation of rare-earth oxide films by a pyrolysis technique from acetylacetonates

被引：4

作者：

Katsumata, T ^{[1
]}

Murakami, T ^{[1
]}

Happo, Y ^{[1
]}

Komuro, S ^{[1
]}

机构：

[1] Toyo Univ, Fac Engn, Kawagoe, Saitama 3500815, Japan

来源：

JOURNAL OF CRYSTAL GROWTH | 1999年 / 198卷

关键词：

rare-earth oxide films; pyrolysis technique; acetylacetonates;

D O I：

10.1016/S0022-0248(98)01188-9

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

(111) oriented Nd doped and nondoped Y2O3 thin films were prepared on the fused quartz substrates by a pyrolysis technique using acetylacetonate complexes coated through a vacuum deposition process. Acetylacetonates, which were evaporated in vacuum (2 x 10(-5) Torr) on to the fused quartz substrates, were oxidized and crystallized at various temperatures in air. Cubic Y2O3 films with (111) orientation were formed on the SiO2 by annealing above 600 degrees C. (C) 1999 Elsevier Science B.V. All rights reserved.

引用

页码：1226 / 1229

页数：4

共 6 条

[1]

BERRY AD, 1988, APPL PHYS LETT, V52, P52

[2] Epitaxial growth of Y2O3 films on Si(100) without an interfacial oxide layer [J].