High-performance Talbot array illuminators

被引：26

作者：

Klaus, W ^{[1
]}

Arimoto, Y

Kodate, K

机构：

[1] Commun Res Labs, Space Commun Div, Tokyo 1848795, Japan

[2] Japan Womens Univ, Dept Math & Phys Sci, Tokyo 112, Japan

来源：

APPLIED OPTICS | 1998年 / 37卷 / 20期

关键词：

D O I：

10.1364/AO.37.004357

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The performance of two-dimensional Talbot array illuminators is discussed in terms of compression ratio, fabrication cost, and illumination efficiency. By comparing two array-illuminator families, we try to answer the question, "Which Talbot array illuminator provides the best illumination performance and requires the least expenditure in fabrication for a given compression ratio?" We further present experimental results obtained with a quartz-glass four-level surface-relief array illuminator designed for a two-dimensional compression ratio of 16 and fabricated with only two lithographic masks. (C) 1998 Optical Society of America.

引用

页码：4357 / 4365

页数：9

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