Development of the SC-RTA process for fabrication of sol-gel based silica-on-silicon integrated optic components

被引：19

作者：

Syms, RRA ^{[1
]}

Holmes, AS ^{[1
]}

Huang, W ^{[1
]}

Schneider, VM ^{[1
]}

Green, M ^{[1
]}

机构：

[1] Univ London Imperial Coll Sci Technol & Med, Opt & Semicond Devices Sect, Dept Elect & Elect Engn, London SW7 2BT, England

来源：

JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY | 1998年 / 13卷 / 1-3期

关键词：

sol-gel glass; silica-on-silicon; integrated optics; planar lightwave circuit;

D O I：

10.1023/A:1008606220011

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The SC-RTA process for fabricating silica-on-silicon PLCs from sol-gel glass is described. A wide range of glasses has been deposited, process temperatures have been reduced, and components fabricated by reactive ion etching, reflow and burial of channel guides have shown steadily decreasing loss. Propagation losses are approximate to 0.2 dB/cm at lambda = 1.523 mu m in a high Delta n system. Passive components demonstrated include tree-structured power splitters and thermo-optic switches.

引用

页码：509 / 516

页数：8

共 20 条

[1]

BARBIER D, 1994, 8 WORLD CER C

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