Defects and transport in complex oxide thin films

被引:282
作者
Ohnishi, Tsuyoshi [1 ]
Shibuya, Keisuke [1 ]
Yamamoto, Takahisa [2 ]
Lippmaa, Mikk [1 ]
机构
[1] Univ Tokyo, Inst Solid State Phys, Chiba 2778581, Japan
[2] Univ Tokyo, Dept Adv Mat Sci, Chiba 2778581, Japan
关键词
D O I
10.1063/1.2921972
中图分类号
O59 [应用物理学];
学科分类号
摘要
Epitaxial oxide thin films are at the heart of new "oxide electronic" applications, such as excitonic ultraviolet light-emitting diodes and resistive switching memories. Complex oxide films are often grown by pulsed laser deposition (PLD) because the technique is believed to be material agnostic. Here, we show that one of the fundamental premises used to justify the use of PLD, that material is transferred from an ablation target to the film without stoichiometry deviations, is incorrect even when no volatile elements are involved. Even more importantly, the commonly used solution of increasing the laser energy density above a material-specific threshold value to obtain stoichiometric films cannot be used in the case of low carrier density systems such as SrTiO(3), where even minute 10(18) cm(-3) order cation nonstoichiometry can have a dramatic effect on transport. Lattice parameter deviations in oxide films, which are often incorrectly ascribed to oxygen loss, correlate very well with cation nonstoichiometry. We show that proper simultaneous choice of ablation laser fluence and ablation area is essential and often more important than the growth temperature and oxygen pressure for obtaining bulklike properties in oxide heterostructures. (C) 2008 American Institute of Physics.
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页数:6
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共 27 条
[1]   A-site cation-vacancy ordering in Sr1-3x/2LaxTiO3:: A study by HRTEM [J].
Battle, PD ;
Bennett, JE ;
Sloan, J ;
Tilley, RJD ;
Vente, JF .
JOURNAL OF SOLID STATE CHEMISTRY, 2000, 149 (02) :360-369
[2]   NON-STOICHIOMETRY IN SRTIO3 [J].
CHAN, NH ;
SHARMA, RK ;
SMYTH, DM .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1981, 128 (08) :1762-1769
[3]   ELECTRICAL-PROPERTIES OF AIR-FIRED NB-DOPED SRTIO3 WITH EXCESS TITANIA [J].
CHO, SG ;
JOHNSON, PF .
FERROELECTRICS, 1992, 132 (1-4) :115-127
[4]   Mechanism of incongruent ablation of SrTiO3 [J].
Dam, B ;
Rector, JH ;
Johansson, J ;
Huijbregtse, J ;
De Groot, DG .
JOURNAL OF APPLIED PHYSICS, 1998, 83 (06) :3386-3389
[5]   HALL MOBILITY IN SRTIO3 [J].
FREDERIKSE, HP ;
HOSLER, WR .
PHYSICAL REVIEW, 1967, 161 (03) :822-+
[6]   INTRINSIC RESPUTTERING IN PULSED-LASER DEPOSITION OF LEAD-ZIRCONATE-TITANATE THIN-FILMS [J].
HAU, SK ;
WONG, KH ;
CHAN, PW ;
CHOY, CL .
APPLIED PHYSICS LETTERS, 1995, 66 (02) :245-247
[7]   Electrical properties of yttrium-doped strontium titanate under reducing conditions [J].
Hui, SQ ;
Petric, A .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2002, 149 (01) :J1-J10
[8]   ATOMIC CONTROL OF THE SRTIO3 CRYSTAL-SURFACE [J].
KAWASAKI, M ;
TAKAHASHI, K ;
MAEDA, T ;
TSUCHIYA, R ;
SHINOHARA, M ;
ISHIYAMA, O ;
YONEZAWA, T ;
YOSHIMOTO, M ;
KOINUMA, H .
SCIENCE, 1994, 266 (5190) :1540-1542
[9]   Excimer laser ablation: energy or power density? A different approach [J].
Laude, LD ;
Dicara, C ;
Kolev, K ;
Schillinger, H .
HIGH-POWER LASER ABLATION V, PTS 1 AND 2, 2004, 5448 :144-152
[10]   Phase stability and interfacial structures in the SrO-SrTiO3 system [J].
McCoy, MA ;
Grimes, RW ;
Lee, WE .
PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1997, 75 (03) :833-846