Different thick-film methods in printing of one-electrode semiconductor gas sensors

被引:21
作者
Golovanov, V
Solis, JL
Lantto, V
Leppavuori, S
机构
[1] UNIV OULU,MICROELECT LAB,FIN-90570 OULU,FINLAND
[2] ODESSA II MECHNIKOV STATE UNIV,FAC PHYS,UA-270100 ODESSA,UKRAINE
[3] UNIV NACL INGN,FAC CIENCIAS,LIMA,PERU
关键词
gas sensor; thick-film sensor; pad printing;
D O I
10.1016/S0925-4005(97)80013-5
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Different thick-film printing techniques have been used for the fabrication of one-electrode semiconductor gas sensors in the form of thick films on insulating alumina substrate. In a typical one-electrode sensor construction, a thin platinum wire (diameter 20 mu m) spiral is embedded inside a sintered oxide semiconductor button. The platinum wire spiral is replaced by a platinum thick-film resistor in our prototype sensor, and the oxide semiconductor is screen printed over the platinum resistor. Both screen printing and gravure offset printing (pad printing) were used for the printing of platinum thick-film resistors. Tin dioxide, an n-type semiconductor, was used as the sensing (shunting) thick-film layer over the platinum resistor, and different amounts of either silver or antimony were used as additives in SnO2. H2S and CO at different concentrations in synthetic air were used to test the response properties of two different sensor types with, respectively, screen-printed and pad-printed platinum thick-film resistors.
引用
收藏
页码:401 / 406
页数:6
相关论文
共 10 条
[1]   X-RAY PHOTOELECTRON-SPECTROSCOPY STUDY OF THE SURFACE-COMPOSITION OF TIN AND ANTIMONY MIXED METAL-OXIDE CATALYSTS [J].
CROSS, YM ;
PYKE, DR .
JOURNAL OF CATALYSIS, 1979, 58 (01) :61-67
[2]   SENSITIVITY AND SELECTIVITY OF DOPED SNO2 THICK-FILM SENSORS TO H2S IN THE CONSTANT-TEMPERATURE AND PULSED-TEMPERATURE MODES [J].
HARKOMAMATTILA, A ;
RANTALA, TS ;
LANTTO, V ;
LEPPAVUORI, S .
SENSORS AND ACTUATORS B-CHEMICAL, 1992, 6 (1-3) :248-252
[3]   EQUILIBRIUM AND NONEQUILIBRIUM CONDUCTANCE RESPONSE OF SINTERED SNO2 SAMPLES TO CO [J].
LANTTO, V ;
RANTALA, TS .
SENSORS AND ACTUATORS B-CHEMICAL, 1991, 5 (1-4) :103-107
[4]   H2S MONITORING AS AN AIR POLLUTANT WITH SILVER-DOPED SNO2 THIN-FILM SENSORS [J].
LANTTO, V ;
MIZSEI, J .
SENSORS AND ACTUATORS B-CHEMICAL, 1991, 5 (1-4) :21-25
[5]  
LANTTO V, 1994, P ITFS 94 WORKSH SZK, P180
[6]  
Lantto V., 1992, Gas Sensors, P117
[7]  
LEPPAVUORI S, 1994, SENSOR ACTUAT A-PHYS, V41, P593
[8]  
LEPPAVUORI S, 1995, P 10 EUR MICR C MAY, P387
[9]   ONE-ELECTRODE SEMICONDUCTOR SENSORS FOR DETECTION OF TOXIC AND EXPLOSIVE GASES IN AIR [J].
MALCHENKO, SN ;
LYCHKOVSKY, IN ;
BAYKOV, MV .
SENSORS AND ACTUATORS B-CHEMICAL, 1992, 7 (1-3) :505-506
[10]  
TAKAHATA K, 1988, CHEM SENSOR TECHNOLO, V1, P39