Noise and emission characteristics of NbC/Nb field emitters

被引:5
作者
Charbonnier, FM [1 ]
Southall, LA [1 ]
Mackie, WA [1 ]
机构
[1] Appl Phys Technol Inc, McMinnville, OR 97128 USA
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2005年 / 23卷 / 02期
关键词
D O I
10.1116/1.1864064
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Several applications require single field emitters with adequate long-term stability and life in a moderate vacuum. Our previous studies have shown that the refractory carbides of transition metals are capable of higher currents and are more environmentally tolerant than common field emitter materials such as W, Mo, or Si. We undertook a systematic study of the emission characteristics and stability of individual NbC/Nb microtips at low currents and at residual pressures ranging from 10(-9) to 10(-5) Torr. We reported preliminary results one year ago [J. Vac. Sci. Technol. B 22, 1643 (2004)]. We now present additional data and interpretations. These experimental data were obtained by two types of measurement: (a) continuous recording of the field emitted current at a fixed voltage and (b) recording of the emitted current with a saw-tooth applied voltage, which yields a large number of Fowler-Nordheim plots which are analyzed by the slop-intercept method. Our experimental results show greater instability than we expected. We conclude that for NbC/Nb emitters fabricated by physical vapor deposition, emission is dominated by a very small number of extremely sharp but unstable nanoprotrusions, with an effective emitting area (from the slope-intercept charts) of the order of a few nm(2). Consequently, we lack the stability and control of the beam directional intensity which are required for most applications. Prior to stable operation, single emitters should be conditioned to eliminate sharp protrusions, enhance paraxial emission, and increase the effective emitter area. We are now studying effective conditioning techniques for microtips. (c) 2005 American Vacuum Society.
引用
收藏
页码:723 / 730
页数:8
相关论文
共 6 条
[1]   Emission characteristics of NbC/Nb field emitters [J].
Charbonnier, FM ;
Southall, LA ;
Mackie, WA .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2004, 22 (04) :1643-1652
[2]   Robust high current field emitter tips and arrays for vacuum microelectronics devices [J].
Charbonnier, FM ;
Mackie, WA ;
Hartman, RL ;
Xie, TB .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2001, 19 (03) :1064-1072
[3]  
DESIERES Y, 2004, 17 INT VAC NAN C BOS, P174
[4]   Relationship between effective work functions and noise powers of emission currents in nickel-deposited field emitters [J].
Gotoh, Y ;
Nagao, M ;
Matsubara, M ;
Inoue, K ;
Tsuji, H ;
Ishikawa, J .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1996, 35 (10A) :L1297-L1300
[5]   ESTIMATION OF METAL-DEPOSITED FIELD EMITTERS FOR THE MICRO-VACUUM TUBE [J].
ISHIKAWA, J ;
TSUJI, H ;
INOUE, K ;
NAGAO, M ;
SASAKI, T ;
KANEKO, T ;
GOTOH, Y .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1993, 32 (3A) :L342-L345
[6]   Transition metal carbide field emitters for field-emitter array devices and high current applications [J].
Mackie, WA ;
Xie, TB ;
Davis, PR .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1999, 17 (02) :613-619