Transition from thermal diffusion to heat accumulation in high repetition rate femtosecond laser writing of buried optical waveguides

被引:320
作者
Eaton, Shane M.
Zhang, Haibin
Ng, Mi Li
Li, Jianzhao
Chen, Wei-Jen
Ho, Stephen
Herman, Peter R.
机构
[1] Univ Toronto, Edward S Rogers Dept Elect & Comp Engn, Toronto, ON M5S 3G4, Canada
[2] Univ Toronto, Inst Opt Sci, Toronto, ON M5S 3G4, Canada
关键词
D O I
10.1364/OE.16.009443
中图分类号
O43 [光学];
学科分类号
070207 [光学]; 0803 [光学工程];
摘要
A variable (0.2 to 5 MHz) repetition rate femtosecond laser was applied to delineate the role of thermal diffusion and heat accumulation effects in forming low-loss optical waveguides in borosilicate glass across a broad range of laser exposure conditions. For the first time, a smooth transition from diffusion-only transport at 200-kHz repetition rate to strong heat accumulation effects at 0.5 to 2 MHz was observed and shown to drive significant variations in waveguide morphology, with rapidly increasing waveguide diameter that accurately followed a simple thermal diffusion model over all exposure variables tested. Amongst these strong thermal trends, a common exposure window of 200-mW average power and similar to 15-mm/s scan speed was discovered across the range of 200-kHz to 2-MHz repetition rates for minimizing insertion loss despite a 10-fold drop in laser pulse energy. Waveguide morphology and thermal modeling indicate that strong thermal diffusion effects at 200 kHz give way to a weak heat accumulation effect at similar to 1-mu J pulse energy for generating low loss waveguides, while stronger heat accumulation effects above 1-MHz repetition rate offered overall superior guiding. A comprehensive characterization of waveguide properties is presented for laser writing in the thermal diffusion and heat accumulation regimes. The waveguides are shown to be thermally stable up to 800 degrees C and can be written in a convenient 520-mu m depth range with low spherical aberration. (C) 2008 Optical Society of America.
引用
收藏
页码:9443 / 9458
页数:16
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