Thermophysical modeling of bump formation during CO2 laser texturing of silicate glasses

被引:22
作者
Bennett, TD [1 ]
Krajnovich, DJ
Li, L
机构
[1] Univ Calif Santa Barbara, Dept Mech & Environm Engn, Santa Barbara, CA 93106 USA
[2] Western Digital Corp, Santa Clara, CA 95054 USA
关键词
D O I
10.1063/1.369462
中图分类号
O59 [应用物理学];
学科分类号
摘要
The thermophysical nature of CO2 laser texturing of glass is explored via numerical simulations. Recent data suggest that laser texture bumps are the product of a local elevation in fictive temperature in the heat affected zone. The numerical model is used to investigate the change in microstructure as manifested in a density change. Using viscosity data, the model employs a dynamic calculation of the glass transition temperature as a function of time scale. The calculation shows that the glass transition temperature increases by 150-300 K over the conventional value in the laser texture process. The maximum thermal penetration depth of the glass transition temperature is numerically determined and the density change calculated. On chemically strengthened glasses, laser texture leads to a density reduction of approximately 2%-3% in the heat affected zone. On unstrengthened glass the density reduction is similar to 1.3% (C) 1999 American Institute of Physics. [S0021-8979(99)08001-9].
引用
收藏
页码:153 / 159
页数:7
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