Structure and properties of carbon and hydrocarbon films deposited in plasma of low-pressure arc and unbalanced DC magnetron

被引：2

作者：

Anisimova, IA ^{[1
]}

Anisimov, VP ^{[1
]}

Makarov, VP ^{[1
]}

Otorbaev, DK ^{[1
]}

机构：

[1] Kyrgyz Natl Acad Sci, Inst Chem & Chem Technol, Bishkek 720071, Kyrgyzstan

来源：

HIGH TEMPERATURE MATERIAL PROCESSES | 1998年 / 2卷 / 01期

关键词：

hydrocarbon films; plasma deposition;

D O I：

10.1615/HighTempMatProc.v2.i1.110

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Amorphous hydrogenated carbon films were deposited in the plasma of a low-pressure are discharge burning at the evaporating graphite electrode and in the plasma of a unbalanced magnetron sputtering discharge in different gas environments (Ar, CH4). The film structure was investigated by micro-diffraction method of transmission electron microscopy. Influence of the deposition technique and of the gas composition on the structure and on optical and electrical properties of the deposited films have been investigated.

引用

页码：143 / 154

页数：12

共 7 条

[1] GRAIN-SIZE AND RECRYSTALLIZATION OF TIN, ZRN, NBN, AND CRN ALLOYED AND MULTILAYER FILMS [J].

ANDRIEVSKI, RA ;

ANISIMOVA, IA ;

ANISIMOV, VP ;

MAKAROV, VP ;

POPOVA, VP .

THIN SOLID FILMS, 1995, 261 (1-2) :83-86

[2]

ANISIMOV VP, 1994, P 12 EUR SECT C AT M, P380

[3]

ANISIMOV VP, 1995, P 12 ISPC MINN MINN, P2167

[4] HARD CARBON AND COMPOSITE METAL HARD CARBON-FILMS PREPARED BY A DC UNBALANCED PLANAR MAGNETRON [J].

BIEDERMAN, H ;

KOHOUTEK, K ;

CHMEL, Z ;

STARY, V ;

HOWSON, RP .

VACUUM, 1990, 40 (03) :251-255

[5] PLASMA DEPOSITED CARBON-FILMS AS A POSSIBLE MEANS FOR DIVERTOR REPAIR [J].

BUURON, AJM ;

BEULENS, JJ ;

GROOT, P ;

BAKKER, J ;

SCHRAM, DC .

THIN SOLID FILMS, 1992, 212 (1-2) :282-295

[6] Mass-spectrometry and actinometry of the low-pressure arc discharge with an evaporating graphite cathode [J].

Kurtynina, GN ;

Otorbaev, DK .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1997, 30 (15) :2223-2228

[7] THE NUCLEATION AND MORPHOLOGY OF DIAMOND CRYSTALS AND FILMS SYNTHESIZED BY THE COMBUSTION FLAME TECHNIQUE [J].

RAVI, KV ;

KOCH, CA ;

HU, HS ;

JOSHI, A .

JOURNAL OF MATERIALS RESEARCH, 1990, 5 (11) :2356-2366

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