Photothermal displacement measurement of transient melting and surface deformation during pulsed laser heating

被引:19
作者
Chen, SC [1 ]
Grigoropoulos, CP
Park, HK
Kerstens, P
Tam, AC
机构
[1] Univ Calif Berkeley, Dept Mech Engn, Berkeley, CA 94720 USA
[2] IBM Corp, Mfg Technol Ctr, Boca Raton, FL 33431 USA
[3] IBM Corp, Almaden Res Ctr, San Jose, CA 95120 USA
关键词
D O I
10.1063/1.122388
中图分类号
O59 [应用物理学];
学科分类号
摘要
A photothermal displacement method has been developed to probe the pulsed laser-induced transient melting and surface deformation of Ni-P hard disk substrates. A probing He-Ne laser beam is aligned collinearly with the near-infrared nanosecond pulsed heating beam. The He-Ne beam spot is scanned on the microfeatures formed on the sample surface by the pulsed laser heating. The deflection signals show the variation of the feature shape resulting from different pulse energies of the heating laser beam. The transient deflection signal also reveals that the time scale of the surface motion is in the range of several hundred nanoseconds. (C) 1998 American Institute of Physics. [S0003-6951(98)03141-6].
引用
收藏
页码:2093 / 2095
页数:3
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