How to model and simulate microgyroscope systems

被引：31

作者：

Teegarden, D ^{[1
]}

Lorenz, G

Neul, R

机构：

[1] Analogy Inc, Beaverton, OR USA

[2] Robert Bosch GmbH, Corp Res Ctr, Stuttgart, Germany

[3] Robert Bosch GmbH, Dept Informat & Syst Technol, Ctr Corp Res & Dev, Stuttgart, Germany

来源：

IEEE SPECTRUM | 1998年 / 35卷 / 07期

关键词：

D O I：

10.1109/6.694362

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

An accurate physical model of a micromechanical system can save valuable design time and slash a number of foundry runs needed for characterization. Using a set of simulators and field solvers, a method for modeling the mechanical and electrical properties of a microgyroscope system is presented.

引用

页码：66 / 75

页数：10