Detection of reducing gases in air by beta-Ga2O3 thin films using self-heated and externally (oven-) heated operation modes

被引：15

作者：

Reti, F ^{[1
]}

Fleischer, M ^{[1
]}

Perczel, IV ^{[1
]}

Meixner, H ^{[1
]}

Giber, J ^{[1
]}

机构：

[1] SIEMENS AG,RES LABS,D-81739 MUNICH,GERMANY

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1996年 / 34卷 / 1-3期

关键词：

reducing gases; beta-Ga2O3 thin films;

D O I：

10.1016/S0925-4005(97)80012-3

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

This work compares the results obtained in the detection of ethanol, CO and CH4 in air by the oxide semiconductor beta-Ga2O3 by monitoring its electrical resistance using the external heating of the sensor or having its own heating device on the back side of the substrate. The difference found in the results is attributed to the dominance of one or of the other parallel effects as described here: (1) partial oxidation in the gas phase of the reducing gas to be detected diminishing its concentration before reaching the sensor and (2) thermal activation of the reducing gases facilitating several chemical interactions, e.g. dissociative adsorption.

引用

页码：378 / 382

页数：5

共 5 条

[1]

COFFEY S, 1964, RODDS CHEM CARBON A, V1, P377

[2]

ERDEYGRUZ T, 1964, THEORETICAL PHYSICAL, V2, P583

[3] COADSORPTION AND CROSS-SENSITIVITY ON HIGH-TEMPERATURE SEMICONDUCTING METAL-OXIDES - WATER EFFECT ON THE COADSORPTION PROCESS [J].