Chemical composition and electrical conduction mechanism for CdO:F thin films deposited by spray pyrolysis

被引：54

作者：

Ferro, R

Rodríguez, JA

Vigil, O

Morales-Acevedo, A

机构：

[1] Univ La Habana, Fac Fis, Havana 10400, Cuba

[2] CINVESTAV, IPN, Dept Ingn Elect, Mexico City 07360, DF, Mexico

来源：

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 2001年 / 87卷 / 01期

关键词：

cadmium oxide; spray pyrolysis; conduction mechanism; mobility;

D O I：

10.1016/S0921-5107(01)00620-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Interest in CdO is growing thanks to its potential use in different optoelectronic devices. Doping with fluorine has effectively improved its electro-optical properties. An analysis of the composition and electrical conduction mechanism of CdO:F films deposited by spray pyrolysis is made. Film properties result from the combined effect of oxygen substitution and oxygen vacancy occupation by fluorine atoms. Carrier scattering seems to be due to phonons and ionized or neutral impurities. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：83 / 86

页数：4

共 15 条

[1]

Badeker K, 1907, ANN PHYS-BERLIN, V22, P749

[2] Effect of CdO interlayer on electrical characteristics in Se-Bi diodes [J].

Champness, CH ;

Xu, Z .

APPLIED SURFACE SCIENCE, 1998, 123 :485-489

[3]

CHU TL, 1990, J ELECT MAT, V19, P1002

[4] NEUTRAL IMPURITY SCATTERING IN SEMICONDUCTORS [J].

ERGINSOY, C .

PHYSICAL REVIEW, 1950, 79 (06) :1013-1014

[5] Some physical properties of F-doped CdO thin films deposited by spray pyrolysis [J].

Ferro, R ;

Rodríguez, JA .

THIN SOLID FILMS, 1999, 347 (1-2) :295-298

[6]

Fistul V.I., 1995, Heavily Doped Semiconductors

[7] CHARACTERIZATION OF TRANSPARENT CONDUCTING CDO FILMS DEPOSITED BY SPRAY-PYROLYSIS [J].

GURUMURUGAN, K ;

MANGALARAJ, D ;

NARAYANDASS, SK ;

SEKAR, K ;

VALLABHAN, CPG .

SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1994, 9 (10) :1827-1832

[8]

Liu XQ, 1997, TRANSDUCERS 97 - 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, P585, DOI 10.1109/SENSOR.1997.613718

[9] ELECTRICAL AND OPTICAL PROPERTIES OF SPUTTERED IN2O3 FILMS .I. ELECTRICAL PROPERTIES AND INTRINSIC ABSORPTION [J].

MULLER, HK .

PHYSICA STATUS SOLIDI, 1968, 27 (02) :723-&

[10] ELECTRICAL-PROPERTIES OF UNDOPED IN2O3 FILMS PREPARED BY REACTIVE EVAPORATION [J].

NOGUCHI, S ;

SAKATA, H .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1980, 13 (06) :1129-1133

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