Transverse surface acoustic wave detection by scanning acoustic force microscopy

被引:26
作者
Behme, G [1 ]
Hesjedal, T [1 ]
Chilla, E [1 ]
Frohlich, HJ [1 ]
机构
[1] Paul Drude Inst Festkorperelekt, D-10117 Berlin, Germany
关键词
D O I
10.1063/1.122026
中图分类号
O59 [应用物理学];
学科分类号
摘要
We present a scanning acoustic force microscope (SAFM) for the study of surface acoustic wave (SAW) phenomena on the submicron lateral scale. Until now, SAWs with in-plane oscillation components could only be studied effectively via nonvanishing out-of-plane oscillation contributions. By operating the microscope in lateral force mode, where both bending and torsion of the cantilever are detected, additional amplitude-dependent signals are found, which are due to the interaction with purely in-plane polarized surface oscillations. To demonstrate the capabilities of this type of SAFM, Love waves were studied on the surface of layers deposited on ST-cut quartz with SAW propagation perpendicular to the crystal X-axis. The phase velocity of the wave as well as the amplitude of a standing wave field was measured and compared to calculated values. (C) 1998 American Institute of Physics.
引用
收藏
页码:882 / 884
页数:3
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