Electrical and optical properties of F-doped textured SnO2 films deposited by APCVD

被引:47
作者
Ma, HL
Zhang, DH
Win, SZ
Li, SY
Chen, YP
机构
[1] SHANDONG UNIV,DEPT PHYS,JINAN 250100,SHANDONG,PEOPLES R CHINA
[2] SHANDONG UNIV,INST OPTOELECT MAT & DEVICES,JINAN 250100,SHANDONG,PEOPLES R CHINA
关键词
transparent conducting films; atmospheric pressure; chemical vapour deposition; electrical properties;
D O I
10.1016/0927-0248(95)00161-1
中图分类号
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号
0807 ; 0820 ;
摘要
This paper presents the structural, electrical and optical properties of transparent conducting F-doped textured SnO2 films prepared by atmosphere pressure chemical vapour deposition (APCVD). Polycrystalline SnO2:F films having a variable preferred orientation have been obtained with resistivity as low as 5 x 10(-4) Omega cm, with carrier concentrations between 3.5 x 10(20) and 7 x 10(20) cm(-3), and Hall mobilities from 15.7 to 20.1 cm(2)/V/s. The average transmittance (including diffusion transmittance) is as high as 94% in the wavelength range of the visible spectrum and the maximum infrared reflectance reaches 92% for a film 655 nm thick. The figure of merit phi(TC) = T-10/R(sh) (7.12 x 10(-2) S) of these films is the highest amongst the results reported on doped SnO2 films.
引用
收藏
页码:371 / 380
页数:10
相关论文
共 25 条
[1]   CORRELATION BETWEEN STRUCTURAL AND ELECTRICAL-PROPERTIES OF SPRAYED TIN OXIDE-FILMS WITH AND WITHOUT FLUORINE DOPING [J].
BRUNEAUX, J ;
CACHET, H ;
FROMENT, M ;
MESSAD, A .
THIN SOLID FILMS, 1991, 197 (1-2) :129-142
[2]   TRANSPARENT CONDUCTORS - A STATUS REVIEW [J].
CHOPRA, KL ;
MAJOR, S ;
PANDYA, DK .
THIN SOLID FILMS, 1983, 102 (01) :1-46
[3]   TIN OXIDE COATINGS - PHYSICAL-PROPERTIES AND APPLICATIONS [J].
DEWAAL, H ;
SIMONIS, F .
THIN SOLID FILMS, 1981, 77 (1-3) :253-258
[4]  
Drude P, 1900, PHYS Z, V1, P161
[5]   TEXTURED TIN OXIDE-FILMS PRODUCED BY ATMOSPHERIC-PRESSURE CHEMICAL VAPOR-DEPOSITION FROM TETRAMETHYLTIN AND THEIR USEFULNESS IN PRODUCING LIGHT TRAPPING IN THIN-FILM AMORPHOUS-SILICON SOLAR-CELLS [J].
GORDON, RG ;
PROSCIA, J ;
ELLIS, FB ;
DELAHOY, AE .
SOLAR ENERGY MATERIALS, 1989, 18 (05) :263-281
[6]   NEW FIGURE OF MERIT FOR TRANSPARENT CONDUCTORS [J].
HAACKE, G .
JOURNAL OF APPLIED PHYSICS, 1976, 47 (09) :4086-4089
[7]   THE PHYSICAL-PROPERTIES OF FLUORINE-DOPED TIN DIOXIDE FILMS AND THE INFLUENCE OF AGING AND IMPURITY EFFECTS [J].
HAITJEMA, H ;
ELICH, J .
SOLAR ENERGY MATERIALS, 1987, 16 (1-3) :79-90
[8]   THE OPTICAL, ELECTRICAL AND STRUCTURAL-PROPERTIES OF FLUORINE-DOPED, PYROLYTICALLY SPRAYED TINDIOXIDE COATINGS [J].
HAITJEMA, H ;
ELICH, JJP ;
HOOGENDOORN, CJ .
SOLAR ENERGY MATERIALS, 1989, 18 (05) :283-297
[9]   EFFICIENCY OF THE A-SI-H SOLAR-CELL AND GRAIN-SIZE OF SNO2 TRANSPARENT CONDUCTIVE FILM [J].
IIDA, H ;
SHIBA, N ;
MISHUKU, T ;
KARASAWA, H ;
ITO, A ;
YAMANAKA, M ;
HAYASHI, Y .
IEEE ELECTRON DEVICE LETTERS, 1983, 4 (05) :157-159
[10]   PREPARATION AND PROPERTIES OF TRANSPARENT CONDUCTING INDIUM TIN OXIDE-FILMS DEPOSITED BY REACTIVE EVAPORATION [J].
MA, HL ;
ZHANG, DH ;
MA, P ;
WIN, SZ ;
LI, SY .
THIN SOLID FILMS, 1995, 263 (01) :105-110