Characterization of transparent aluminium oxide and indium tin oxide layers on polymer substrates

被引：111

作者：

Henry, BM ^{[1
]}

Erlat, AG ^{[1
]}

McGuigan, A ^{[1
]}

Grovenor, CRM ^{[1
]}

Briggs, GAD ^{[1
]}

Tsukahara, Y ^{[1
]}

Miyamoto, T ^{[1
]}

Noguchi, N ^{[1
]}

Niijima, T ^{[1
]}

机构：

[1] Univ Oxford, Dept Mat, Oxford OX1 3PH, England

来源：

THIN SOLID FILMS | 2001年 / 382卷 / 1-2期

关键词：

gas barrier films; magnetron sputtering; aluminium oxide; indium tin oxide;

D O I：

10.1016/S0040-6090(00)01769-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The structural, mechanical and gas barrier properties of aluminium oxide and indium tin oxide coatings deposited by DC reactive sputtering on poly(ethylene terephthalate) has been investigated. The oxygen and water vapour transmission rates of the films were measured as a function of temperature in order to assess the effectiveness of the oxides as gas barriers. Both types of composites exhibited good resistance to water vapour transmission. However, the indium tin oxide coating was significantly more effective as a gas barrier than the conventional aluminium oxide. The microstructural integrity of the oxide coatings was examined using scanning electron microscopy and atomic force microscopy. It was found that the sputtered layers featured a relatively low density of defects. The aluminium oxide films featured larger and many more defects than the indium tin oxide composites. This difference, along with a preliminary observation of a difference in the chemical interaction of water vapour with indium tin oxide (ITO) and aluminium oxide (AIO(chi)), is believed to offer an explanation to the observed gas barrier properties. In addition to displaying good gas barrier characteristics, the ITO films were found to have better resistance to mechanical damage than either aluminium oxide and silicon oxide films. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：194 / 201

页数：8

共 16 条

[1] ATOMIC-FORCE MICROSCOPY AND PERMEABILITY STUDY OF STRETCHING-INDUCED GAS BARRIER LOSS OF ALOX LAYERS [J].