RF discharges at atmospheric pressure

被引:14
作者
Brablec, A
Kapicka, V
Ondrácek, Z
Slavícek, P
Strecha, M
Stastny, F
Vaculík, R
Sícha, M
机构
[1] Masaryk Univ, Dept Phys Elect, Fac Sci, Brno 61137, Czech Republic
[2] Charles Univ, Dept Elect & Vacuum Phys, Fac Math & Phys, Prague 18000 8, Czech Republic
关键词
D O I
10.1023/A:1022896916784
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
The described plasma source is based on the RF torch discharge. The powered RF electrode of the torch discharge plasma source is made from the thin metal pipe with an inner diameter of 1-2 mm and with a length of several cm. The working gas (argon pure or with an admixture of reactive components) hows through the RF electrode as the nozzle. The electrode is connected through the matching unit to the RF generator of the frequency of 13.56 MHz. The advantage of this described plasma source consists in the fact that the torch discharge remains stable up to the atmospherical pressure of the working gas even in the liquid environments. Up to now the torch discharge has been used only for treatment in liquid environment only for archaeological artefacts. For further applications it is necessary to additional study of this phenomenon. While in previous papers we presented a measurement of different temperatures from spectra emitted by plasma, there is drawn attention to equintensity maps inside the nozzle.
引用
收藏
页码:329 / 334
页数:6
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