Development and application of lateral comb-drive actuator

被引：18

作者：

Chen, CC ^{[1
]}

Lee, C ^{[1
]}

Lai, YJ ^{[1
]}

Chen, WC ^{[1
]}

机构：

[1] Asia Pacific Microsyst Inc, Hsinchu, Taiwan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2003年 / 42卷 / 6B期

关键词：

MEMS; SOI; actuators; comb drive; VOA; optical switch;

D O I：

10.1143/JJAP.42.4059

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A lateral comb-drive actuator with a thinned three-folded spring is proposed. This new actuator structure enables a large displacement under the same applied voltage as that for a traditional comb-drive actuator of folded spring. Thereof, in this paper, the new comb structure is applied as an actuator of optical switch and a variable optical attenuator. The promising results prove the feasibility of the design of the new comb structure.

引用

页码：4059 / 4062

页数：4

共 6 条

[1]

GERE JM, 1984, MECH MAT, pCH7

[2]

Jaecklin V. P., 1992, Journal of Micromechanics and Microengineering, V2, P250, DOI 10.1088/0960-1317/2/4/006

[3] High-aspect-ratio Si vertical micromirror arrays for optical switching [J].