Laser ablation rate of materials using the generated acoustic waves

被引：21

作者：

Efthimiopoulos, T ^{[1
]}

Kritsotakis, E

Kiagias, H

Savvakis, C

Bertachas, Y

机构：

[1] Univ Crete, Dept Phys, Laser Lab, Heraklion 71003, Crete, Greece

[2] Univ Crete, Sch Med, Dept Med, Heraklion, Crete, Greece

[3] Tech Educ Inst, Dept Sci, Heraklion, Crete, Greece

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1998年 / 31卷 / 19期

关键词：

D O I：

10.1088/0022-3727/31/19/039

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

It is shown that the acoustic waves generated during laser ablation can be used to determine the ablation threshold and the ablation rate for different fluences and depths and also to characterize the different regions of the process. On-line measurement of the individual ablation rate is possible by observation of the delay of the arrival of the acoustic wave to a piezoelectric detector located behind the sample.

引用

页码：2648 / 2652

页数：5

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