Pattern uniformity control in room-temperature imprint lithography

被引：19

作者：

Hong, PS ^{[1
]}

Lee, HH ^{[1
]}

机构：

[1] Seoul Natl Univ, Sch Chem Engn, Seoul 151742, South Korea

来源：

APPLIED PHYSICS LETTERS | 2003年 / 83卷 / 12期

关键词：

D O I：

10.1063/1.1613363

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Nonuniformity in patterning that can arise in room-temperature imprint lithography is analyzed and a condition is presented under which the uniformity is assured. The condition is developed in such a way that the elastic recovery of stain-hardened polymer after the mold is removed does not cause the nonuniformity. Experimental testing of the condition reveals that it is a reliable criterion for uniform patterning. (C) 2003 American Institute of Physics.

引用

页码：2441 / 2443

页数：3

共 22 条

[1] Nano-indentation of polymeric surfaces [J].

Briscoe, BJ ;

Fiori, L ;

Pelillo, E .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1998, 31 (19) :2395-2405

[2] Identification of the viscoplastic behavior of a polycarbonate based on experiments and numerical modeling of the nano-indentation test [J].

Bucaille, JL ;

Felder, E ;

Hochstetter, G .

JOURNAL OF MATERIALS SCIENCE, 2002, 37 (18) :3999-4011

[3] Sub-10 nm imprint lithography and applications [J].

Chou, SY ;

Krauss, PR ;

Zhang, W ;

Guo, LJ ;

Zhuang, L .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1997, 15 (06) :2897-2904

[4] IMPRINT OF SUB-25 NM VIAS AND TRENCHES IN POLYMERS [J].

CHOU, SY ;

KRAUSS, PR ;

RENSTROM, PJ .

APPLIED PHYSICS LETTERS, 1995, 67 (21) :3114-3116

[5] Study of elastic modulus and yield strength of polymer thin films using atomic force microscopy [J].

Du, BY ;

Tsui, OKC ;

Zhang, QL ;

He, TB .

LANGMUIR, 2001, 17 (11) :3286-3291

[6] Analysis of nanoindentation load-displacement loading curves [J].

Hainsworth, SV ;

Chandler, HW ;

Page, TF .

JOURNAL OF MATERIALS RESEARCH, 1996, 11 (08) :1987-1995

[7]

Johnson K. L., 1987, CONTACT MECH

[8]

Khang DY, 2001, ADV MATER, V13, P749, DOI 10.1002/1521-4095(200105)13:10<749::AID-ADMA749>3.0.CO

[9]

2-7

[10] Fabrication of three-dimensional microstructures by soft molding [J].

Kim, YS ;

Suh, KY ;

Lee, HH .

APPLIED PHYSICS LETTERS, 2001, 79 (14) :2285-2287

← 1 2 3 →