Growth of optically-active InN with AlInN buffer by plasma-assisted molecular beam epitaxy

被引：3

作者：

Jmerik, VN ^{[1
]}

Vekshin, VA ^{[1
]}

Shubina, TV ^{[1
]}

Ratnikov, VV ^{[1
]}

Ivanov, SV ^{[1
]}

Monemar, B ^{[1
]}

机构：

[1] AF Ioffe Phys Tech Inst, St Petersburg 194021, Russia

来源：

5TH INTERNATIONAL CONFERENCE ON NITRIDE SEMICONDUCTORS (ICNS-5), PROCEEDINGS | 2003年 / 0卷 / 07期

关键词：

D O I：

10.1002/pssc.200303520

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

InN films have been grown by plasma-assisted MBE on Al2O3(0001) substrates using different buffer fabrication techniques: thermo-activated In diffusion into nitridated sapphire during InN buffer annealing and deposition of 20 nm AlxIn1-xN buffer layers with x = 0.1-0.5. Different In/N flux ratio conditions are employed. The InN epilayers demonstrate IR photoluminescence in the 0.6-1.0 mum range, with an ambiguous dependence of the PL intensity on structural quality of the films. The highest quality 0.5 mum thick InN layer having (0002) XRD Theta-rocking curve width below 400 arcsec and smooth continuous interface with the substrate does not show any PL. (C) 2003 WILEYNCH Verlag GmbH & Co. KGaA. Weinheim.

引用

页码：2846 / 2850

页数：5

共 10 条

[1]

Davydov VY, 2002, PHYS STATUS SOLIDI B, V230, pR4, DOI 10.1002/1521-3951(200204)230:2<R4::AID-PSSB99994>3.0.CO

[2]

2-Z

[3]

IVANOV SV, 2003, IN PRESS RES SIGNPOS

[4]

Jmerik VN, 2001, PHYS STATUS SOLIDI A, V188, P615, DOI 10.1002/1521-396X(200112)188:2<615::AID-PSSA615>3.0.CO

[5]

2-J

[6]

Mamutin VV, 1999, PHYS STATUS SOLIDI A, V176, P247, DOI 10.1002/(SICI)1521-396X(199911)176:1<247::AID-PSSA247>3.0.CO

[7]

2-I

[8] Bragg and Laue x-ray diffraction study of dislocations in thick hydride vapor phase epitaxy GaN films [J].

Ratnikov, V ;

Kyutt, R ;

Shubina, T ;

Paskova, T ;

Valcheva, E ;

Monemar, B .

JOURNAL OF APPLIED PHYSICS, 2000, 88 (11) :6252-6259

[9]

Yamamoto A, 2001, PHYS STATUS SOLIDI B, V228, P5, DOI 10.1002/1521-3951(200111)228:1<5::AID-PSSB5>3.0.CO

[10]

2-E

← 1 →