Femtosecond laser pulse induced breakdown in dielectric thin films

被引：148

作者：

Jasapara, J ^{[1
]}

Nampoothiri, AVV

Rudolph, W

Ristau, D

Starke, K

机构：

[1] Univ New Mexico, Dept Phys & Astron, Albuquerque, NM 87131 USA

[2] Laser Zentrum Hannover eV, D-30419 Hannover, Germany

来源：

PHYSICAL REVIEW B | 2001年 / 63卷 / 04期

关键词：

D O I：

10.1103/PhysRevB.63.045117

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Laser-induced breakdown of a high-quality mirror consisting of alternating lambda /4 layers of Ta2O5 and SiO2 and a single 500-nm thin film of Ta2O5 were studied with amplified and unamplified femtosecond pulses. Thr experimental data can be fitted with a model taking into account multiphoton absorption. impact ionization. and local intensity enhancements due to interference effects in the films. Incubation effects are observed when the coatings are damaged with multiple pulses from a femtosecond oscillator. The results indicate that state of the art, high-quality thin films show a damage behavior that is similar to bulk materials. Defects and impurities play a negligible role.

引用

页数：5

共 14 条

[1]

BETTIS JR, 1976, NBS SPEC PUBL, V462, P338

[2]

HENKING R, 1994, P SOC PHOTO-OPT INS, V2428, P281

[3] Characterization of sub-10-fs pulse focusing with high-numerical-aperture microscope objectives [J].

Jasapara, J ;

Rudolph, W .

OPTICS LETTERS, 1999, 24 (11) :777-779

[4]

JONES SC, 1989, OPT ENG, V28, P1039, DOI 10.1117/12.7977089

[5] Microscopic processes in dielectrics under irradiation by subpicosecond laser pulses [J].

Kaiser, A ;

Rethfeld, B ;

Vicanek, M ;

Simon, G .

PHYSICAL REVIEW B, 2000, 61 (17) :11437-11450

[6]

Keldysh L. V., 1964, ZH EKSP TEOR FIZ, V20, P1307

[7] PULSED LASER DAMAGE IN THIN-FILM COATINGS - FLUORIDES AND OXIDES [J].

LANGE, MR ;

MCIVER, JK ;

GUENTHER, AH .

THIN SOLID FILMS, 1985, 125 (1-2) :143-155

[8] Precision laser ablation of dielectrics in the 10-fs regime [J].

Lenzner, M ;

Krüger, J ;

Kautek, W ;

Krausz, F .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1999, 68 (03) :369-371

[9] Femtosecond optical breakdown in dielectrics [J].

Lenzner, M ;

Kruger, J ;

Sartania, S ;

Cheng, Z ;

Spielmann, C ;

Mourou, G ;

Kautek, W ;

Krausz, F .

PHYSICAL REVIEW LETTERS, 1998, 80 (18) :4076-4079

[10] Ultrafast electron dynamics in femtosecond optical breakdown of dielectrics [J].

Li, M ;

Menon, S ;

Nibarger, JP ;

Gibson, GN .

PHYSICAL REVIEW LETTERS, 1999, 82 (11) :2394-2397

← 1 2 →