Electrochemical deposition of Bi2Te3 for thermoelectric microdevices

被引:78
作者
Tittes, K
Bund, A
Plieth, W [1 ]
Bentien, A
Paschen, S
Plötner, M
Gräfe, H
Fischer, WJ
机构
[1] Tech Univ Dresden, Inst Phys Chem & Electrochem, D-01062 Dresden, Germany
[2] Max Planck Inst Chem Phys Solids, D-01187 Dresden, Germany
[3] Tech Univ Dresden, Semicond Technol & Microsyst Lab, D-01062 Dresden, Germany
关键词
bismuth telluride films; cyclic voltammetry; electrodeposition; thermoelectric battery; thermoelectric sensor;
D O I
10.1007/s10008-003-0378-8
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
The electrolyses of solutions of bismuth oxide and tellurium oxide in nitric acid with molar ratios of Bi:Te=3:3-4:3 lead to cathodic deposits of films of bismuth telluride (Bi2Te3), an n-type semiconductor. Current densities of 2-5 mA/cm(2) were applied. Voltammetric investigations showed that Bi2Te3 deposition occurred at potentials more negative than -0.125 V (Ag/AgCl, 3 M KCl). The deposit was identified as bismuth telluride (gamma-phase) by X-ray analysis. Hall-effect measurements verified the n-type semiconducting behaviour. The films can be deposited in microstructures for thermoelectric microdevices like thermoelectric batteries or thermoelectric sensors.
引用
收藏
页码:714 / 723
页数:10
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