Fabrication of PRTs and analysis of characteristics

Platinum thin films have been prepared on Al2O3 substrates by DC magnetron sputtering. Platinum resistance thermometers have been fabricated and their characteristics analysed. We used a UV laser (wavelength 355 nm) to adjust the Pt thin films temperature sensors to 100 Omega at 0degreesC. As result of setting the Pt resistors to the target value of 109.73 Omega at 25degreesC, 82.3% of total resistors had a tolerance within +/-0.03 Omega and 17.7% were within +/-0.06 Omega of A-class tolerance according to DIN EN 60751. The PRTs which were fabricated in this research had excellent characteristics such as high accuracy, long-term stability, wide temperature range, good linearity, good repeat ability and rapid response time.