Electrothermal modelling of silicon PCR chips

被引：4

作者：

Cui, Z ^{[1
]}

Zhao, Z ^{[1
]}

Xia, SH ^{[1
]}

机构：

[1] Rutherford Appleton Lab, Didcot OX11 0QX, Oxon, England

来源：

MEMS DESIGN, FABRICATION, CHARACTERIZATION, AND PACKAGING | 2001年 / 4407卷

关键词：

MEMS design; PCR; lab-on-chip; electrothermal modelling;

D O I：

10.1117/12.425312

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Polymerase chain reaction (PCR) on a microchip has drawn considerable attention in recent years. Although a microchip can have much fast heating and cooling rate, the delicacy in its structure makes the PCR experiment difficult and cracks often occurs particularly for the thin membrane type of PCR chips. Electrothermal modelling of PCR chips is presented using commercial MEMS software tool IntelliSuite (TM), with the aim of identifying the problems encountered in experiment and finding an optimum chip structure. Heating characteristics of four different heater designs have been compared, so have the PCR chambers with fixed frame and with suspended frame. The thermal stress analysis has shown that the structure and heater design can make significant difference in heating characteristics and in reducing the failure of PCR chips. The computer simulation has confirmed what has been found in experiment the reason of membrane cracks. Improvement in PCR chip design has been proposed.

引用

页码：275 / 280

页数：6

共 6 条

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