Confocal microscopy with a refractive microlens-pinhole array

被引：40

作者：

Eisner, M ^{[1
]}

Lindlein, N ^{[1
]}

Schwider, J ^{[1
]}

机构：

[1] Univ Erlangen Nurnberg, Inst Phys, Lehrstuhl Opt, D-91058 Erlangen, Germany

来源：

OPTICS LETTERS | 1998年 / 23卷 / 10期

关键词：

D O I：

10.1364/OL.23.000748

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The stable setup of a confocal arrangement consisting of a combination of a refractive microlens and a pinhole array is presented. The focal plane of the microlenses lies at the rear surface of the substrate in the pinhole plane. By using a microscope objective one can image the stop array onto the object at a reduced size. Surface profiles of refractive and diffractive optical elements were measured with the help of this confocal microscope. (C) 1998 Optical Society of America.

引用

页码：748 / 749

页数：2

共 6 条

[1]

Minsky M., 1957, U.S. Patent, Patent No. [3013467, #3013467]

[2] TANDEM-SCANNING REFLECTED-LIGHT MICROSCOPE [J].

PETRAN, M ;

HADRAVSKY, M ;

EGGER, MD ;

GALAMBOS, R .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1968, 58 (05) :661-+

[3] TECHNIQUE FOR MONOLITHIC FABRICATION OF MICROLENS ARRAYS [J].

POPOVIC, ZD ;

SPRAGUE, RA ;

CONNELL, GAN .

APPLIED OPTICS, 1988, 27 (07) :1281-1284

[4]

SCHWIDER J, 1996, Patent No. 196325943

[5] 3-DIMENSIONAL ANALYSIS BY A MICROLENS-ARRAY CONFOCAL ARRANGEMENT [J].

TIZIANI, HJ ;

UHDE, HM .

APPLIED OPTICS, 1994, 33 (04) :567-572

[6]

ZEISS FC, 1991, Patent No. 0485803

← 1 →