High-Q Tunable Microwave Cavity Resonators and Filters Using SOI-Based RF MEMS Tuners

被引：144

作者：

Liu, Xiaoguang ^{[1
]}

Katehi, Linda P. B. ^{[2
]}

Chappell, William J. ^{[1
]}

Peroulis, Dimitrios ^{[1
]}

机构：

[1] Purdue Univ, Sch Elect & Comp Engn, W Lafayette, IN 47907 USA

[2] Univ Calif Davis, Davis, CA 95616 USA

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2010年 / 19卷 / 04期

关键词：

Electrostatic actuation; evanescent-mode cavity; microelectromechanical systems (MEMS); quality factor; tunable filter; tunable resonator; tuning; MODE RESONATORS; BANDPASS FILTER; FILMS; BEAM;

D O I：

10.1109/JMEMS.2010.2055544

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents the modeling, design, fabrication, and measurement of microelectromechanical systems-enabled continuously tunable evanescent-mode electromagnetic cavity resonators and filters with very high unloaded quality factors (Q(u)). Integrated electrostatically actuated thin diaphragms are used, for the first time, for tuning the frequency of the resonators/filters. An example tunable resonator with 2.6 : 1 (5.0-1.9 GHz) tuning ratio and Q(u) of 300-650 is presented. A continuously tunable two-pole filter from 3.04 to 4.71 GHz with 0.7% bandwidth and insertion loss of 3.55-2.38 dB is also shown as a technology demonstrator. Mechanical stability measurements show that the tunable resonators/filters exhibit very low frequency drift (less than 0.5% for 3 h) under constant bias voltage. This paper significantly expands upon previously reported tunable resonators. [2010-0033]

引用

页码：774 / 784

页数：11

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