共 11 条
[2]
Eckstein W., 1991, COMPUTER SIMULATION
[3]
*ITER, 1999, NUCL FUS, V39
[5]
KOGLER U, 1997, 3361 JUL
[7]
PLASMA AND SURFACE MODELING OF THE DEPOSITION OF HYDROGENATED CARBON-FILMS FROM LOW-PRESSURE METHANE PLASMAS
[J].
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING,
1993, 56 (06)
:527-546