Remote instrument diagnosis on the Internet

被引：25

作者：

Caldwell, NHM ^{[1
]}

Breton, BC ^{[1
]}

Holburn, DM ^{[1
]}

机构：

[1] Univ Cambridge, Dept Engn, Cambridge CB2 1PZ, England

来源：

IEEE INTELLIGENT SYSTEMS & THEIR APPLICATIONS | 1998年 / 13卷 / 03期

关键词：

D O I：

10.1109/5254.683212

中图分类号：

TP18 [人工智能理论];

学科分类号：

081104 ; 0812 ; 0835 ; 1405 ;

摘要：

This expert system uses generic tools such as web browsers to aid service engineers in remotely diagnosing the faults in LEO scanning electron microscopes. The system lets engineers acquire information directly from the SEM, diagnose inaccurate behavior, and remedy inappropriate instrument settings.

引用

页码：70 / 76

页数：7

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