New positive-type photosensitive polyimide: Poly(hydroxyimide) with diazonaphthoquinone

被引：38

作者：

Nakayama, T ^{[1
]}

Mochizuki, A ^{[1
]}

Ueda, M ^{[1
]}

机构：

[1] YAMAGATA UNIV,FAC ENGN,DEPT MAT SCI & ENGN,YONEZAWA,YAMAGATA 992,JAPAN

来源：

REACTIVE & FUNCTIONAL POLYMERS | 1996年 / 30卷 / 1-3期

关键词：

poly(hydroxyimide); photosensitive polyimide; 2,3,4-tris[1-oxo-2-diazonaphthoquinone-4-sulfonyloxy]phenone; dissolution behavior;

D O I：

10.1016/1381-5148(95)00113-1

中图分类号：

O69 [应用化学];

学科分类号：

081704 ;

摘要：

A positive working photosensitive polyimide based on polyhydroxyimide (PHI) and 2,3,4-tris[1-oxo-2-diazonaphthoquinone-4-sulfonyloxy] benzophenone (D4SB) as a photoreactive compound has been developed. The PHI was prepared by the ring-opening polyaddition of 4,4'-hexafluoroisopropylidenebis(phthalic anhydride) (6FDA), 4,4'-diamino-4 ''-hydroxytriphenylmethane (DHTM), and 4,4'-oxydianiline (ODA), followed by thermal cyclization in refluxing xylene. The PHI film showed excellent transparency to UV light. The photosensitive polyimide containing 30 wt% of D4SB showed a sensitivity of 250 mJ/cm(2) and a contrast of 5.2 when it was exposed to 436 nm light followed by developing with a 1% aqueous tetramethylammonium hydroxide (TMAH) solution at 35 degrees C.

引用

页码：109 / 115

页数：7

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