MoS2 deposited by ion beam assisted deposition:: 2H or random layer structure?

被引:16
作者
Dunn, DN [1 ]
Seitzman, LE [1 ]
Singer, IL [1 ]
机构
[1] USN, Res Lab, Washington, DC 20375 USA
关键词
D O I
10.1557/JMR.1998.0410
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The structure of MoS2 films grown by ion beam assisted deposition is investigated using transmission electron microscopy. Films consist of stacks of S-Mo-S planes with a [001] texture; however, three-dimensional crystal symmetry is disrupted by a high density of planar defects. Selected area electron diffraction patterns show (hk0) and (00l) reflections, features similar to a random layer structure, as well as diffuse (103) reflections. It is suggested that these films do not have a true random layer structure, but rather a two-dimensional structure formed by nonrandom in-plane translations.
引用
收藏
页码:3001 / 3007
页数:7
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