Spatial mapping in the electron-impact ion-source of a residual gas analyser

被引：7

作者：

Holst, B ^{[1
]}

Buckland, JR ^{[1
]}

Allison, W ^{[1
]}

机构：

[1] Univ Cambridge, Cavendish Lab, Cambridge CB3 0HE, England

来源：

VACUUM | 1999年 / 53卷 / 1-2期

关键词：

mass spectroscopy; quadrupole mass analysers; helium atom beams; atom optics; low-index single-crystal surfaces; silicon;

D O I：

10.1016/S0042-207X(98)00388-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Experimental measurements of the spatial distribution of ionisation efficiency in a residual gas analyser (RGA) are presented. The efficiency was determined by scanning a focused helium-atom micro-probe across the active volume of the source. The spatial resolution is determined by the diameter of the focused atom beam, which was approximately 200 mu m. The results give a direct explanation of the role of ion energy in the overall sensitivity of quadrupole RGA instruments. (C) 1999 Elsevier Science Ltd. All rights reserved.

引用

页码：207 / 210

页数：4

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