Origin and thermal stability of HK in FeTaN thin films

被引:17
作者
Minor, MK [1 ]
Barnard, JA [1 ]
机构
[1] Univ Alabama, Ctr Mat & Informat Technol, Tuscaloosa, AL 35487 USA
关键词
D O I
10.1063/1.370409
中图分类号
O59 [应用物理学];
学科分类号
摘要
In this study 2000 Angstrom FeTaN thin films are annealed at 150 degrees C in both longitudinal and transverse magnetic fields. Both anneals result in a decrease in H-K, which is shown to be a result of interstitial N, however, the transverse anneal results in a 90 degrees rotation of H-K and a 33% larger decrease in the magnitude of H-K as compared to the longitudinal anneal. Subsequent transverse field anneals show that H-K is completely reversible in relatively short times at any temperature above 75 degrees C. Our results are consistent with the diffusion of interstitial N being responsible for the rotatable behavior of H-K in FeTaN. (C) 1999 American Institute of Physics. [S0021-8979(99)15108-9].
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页码:4565 / 4567
页数:3
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