Transition from laboratory to manufacturing for a dry, laser-assisted cleaning technology

被引:8
作者
Engelsberg, AC [1 ]
机构
[1] Radiance Serv Co, Bethesda, MD 20814 USA
来源
LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING III | 1998年 / 3274卷
关键词
dry cleaning; laser-assisted cleaning; laser processing; surface preparation;
D O I
10.1117/12.309499
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A photon flux from a laser can provide an alternative method to clean and prepare industrial surfaces. The laser-based cleaning method presented in this paper uses only photons coupled with a laminar, flowing gas which is inert to the surface. This method can eliminate or reduce the water and chemical volumes used in industrial applications. In this paper, the development issues bringing a technology into the mainstream are discussed.
引用
收藏
页码:100 / 109
页数:2
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