Structure and optical properties of amorphous diamond films prepared by ArF laser ablation as a function of carbon ion kinetic energy

被引：71

作者：

Merkulov, VI ^{[1
]}

Lowndes, DH ^{[1
]}

Jellison, GE ^{[1
]}

Puretzky, AA ^{[1
]}

Geohegan, DB ^{[1
]}

机构：

[1] Oak Ridge Natl Lab, Oak Ridge, TN 37831 USA

来源：

APPLIED PHYSICS LETTERS | 1998年 / 73卷 / 18期

关键词：

D O I：

10.1063/1.122515

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Amorphous carbon films with variable sp(3) content were produced by ArF (193 nm) pulsed laser deposition. Electron energy loss spectroscopy and spectroscopic ellipsometry were employed to systematically study changes in the bonding and optical properties of the carbon films as a function of the kinetic energy of ablated C ions, which was measured using an ion probe. The measurements reveal that the films with the most diamond-like properties are obtained at the C ion kinetic energy of similar to 90 eV. In contrast to measurements made as a function of laser fluence, ion probe measurements of kinetic energy are a convenient as well as more accurate and fundamental method for monitoring deposition conditions, with the advantage of being readily transferable for interlaboratory comparisons. (C) 1998 American Institute of Physics. [S0003-6951(98)03044].

引用

页码：2591 / 2593

页数：3

共 18 条

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