Multilayer and functional coatings on carbon nanotubes using atomic layer deposition

被引:73
作者
Herrmann, CF
Fabreguette, FH
Finch, DS
Geiss, R
George, SM
机构
[1] Univ Colorado, Dept Chem & Biochem, Boulder, CO 80309 USA
[2] Univ Colorado, Dept Mech Engn, Boulder, CO 80309 USA
[3] Natl Inst Stand & Technol, Mat Reliabil Div 853, Boulder, CO 80305 USA
[4] Univ Colorado, Dept Biol & Chem Engn, Boulder, CO 80309 USA
关键词
D O I
10.1063/1.2053358
中图分类号
O59 [应用物理学];
学科分类号
摘要
Atomic layer deposition (ALD) can be used to deposit ultra-thin and conformal films on flat substrates, high aspect ratios structures and particles. In this paper, we demonstrate that insulating, multilayered and functionalized ALD coatings can also be deposited conformally on carbon nanotubes. Multilayered coatings consisting of alternating layers of dielectric and conductive materials, such as Al2O3 and W, respectively, are deposited on conductive multi-walled carbon nanotubes. This coated carbon nanotube can function as a nanoscale coaxial cable. Thin layers of Al2O3 ALD are also used as a seed layer to functionalize nanotubes. A carbon nanotube was made highly hydrophobic using an Al2O3 ALD seed layer followed by the attachment of perfluorinated molecules. (c) 2005 American Institute of Physics.
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页码:1 / 3
页数:3
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