Three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition

Three-dimensional nanostructure fabrication has been demonstrated by 30 keV Ga+ focused ion beam assisted deposition using a aromatic hydrocarbon precursor. The characterization of deposited film on a silicon substrate was pet-formed by a transmission microscope and Raman spectra. This result indicates that the deposition film is a diamondlike amorphous carbon. Production of three-dimensional nanostructure is discussed. Microcoil, drill, and bellows with 0.1 mum dimension were fabricated as parts of the microsystem. Furthermore, microstructure plastic arts is advocated as a new field using microbeam technology, presenting one example of a microwine glass with 2.75 mum external diameter and 12 mum height. (C) 2000 American Vacuum Society. [S0734-211X(00)06806-2].