Nickel-incorporated amorphous carbon film deposited by femtosecond pulsed laser ablation

被引:51
作者
Benchikh, N
Garrelie, F
Donnet, C
Bouchet-Fabre, B
Wolski, K
Rogemond, F
Loir, AS
Subtil, JL
机构
[1] Univ St Etienne, UMR 5516, Lab Traitement Signal & Instrumentat, F-42000 St Etienne, France
[2] SPAM, Lab Francis Perrin, F-91191 Gif Sur Yvette, France
[3] Ecole Natl Super Mines, Ctr SMS, URA 5146, CNRS, F-42023 St Etienne, France
关键词
diamond-like carbon; femtosecond pulsed laser deposition; doped DLC; laser ablation;
D O I
10.1016/j.tsf.2004.11.162
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Metal-containing diamond-like carbon films (Me-DLC), with metallic particles embedded in a DLC matrix, have become good candidates to improve many film properties (including mechanical properties and adhesion) and to enhance the tribological behavior in severe conditions. Previous studies on the properties of Me-DLC coatings have reported lower compressive stresses and higher wear resistance compared to undoped DLC. In many cases, the presence of metal inclusions enhances adhesion on metallic substrates. The present study investigates the composition and nanostructure of DLC coating alloyed with 50 at.% concentration of nickel. The film is deposited by femtosecond pulsed laser ablation (PLD) by ablating sequentially graphite and nickel targets. The chemical composition and the bonding characteristics of this film are determined by X-ray Photoelectron Spectroscopy (XPS), Near Edge X-ray Absorption Spectroscopy (NEXAFS) and Electron Energy Loss Spectroscopy (EELS) imaging. The chemical composition, the carbon hybridization and the morphology of the a-C:Ni film at the microscopic scale are discussed, in relation to the thermodynamic phase diagram of the Ni-C system. (c) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码:287 / 292
页数:6
相关论文
共 41 条
[1]  
[Anonymous], 2000, MODERN TRIBOLOGY HDB
[2]   Short-pulse laser deposition of diamond-like carbon thin films [J].
Banks, PS ;
Dinh, L ;
Stuart, BC ;
Feit, MD ;
Komashko, AM ;
Rubenchik, AM ;
Perry, MD ;
McLean, W .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1999, 69 (Suppl 1) :S347-S353
[3]   Study of nitrogen pressure effect on the laser-deposited amorphous carbon films [J].
Bulir, J ;
Jelinek, M ;
Vorlicek, V ;
Zemek, J ;
Perina, V .
THIN SOLID FILMS, 1997, 292 (1-2) :318-323
[4]  
Chrisey D. B., 1994, PULSED LASER DEPOSIT
[5]   Recent progress on the tribology of doped diamond-like and carbon alloy coatings: a review [J].
Donnet, C .
SURFACE & COATINGS TECHNOLOGY, 1998, 100 (1-3) :180-186
[6]   Interdigitated microelectrode arrays based on sputtered carbon thin-films [J].
Fiaccabrino, GC ;
Tang, XM ;
Skinner, N ;
deRooij, NF ;
KoudelkaHep, M .
SENSORS AND ACTUATORS B-CHEMICAL, 1996, 35 (1-3) :247-254
[7]   A THERMODYNAMIC EVALUATION OF THE C-FE-NI SYSTEM [J].
GABRIEL, A ;
GUSTAFSON, P ;
ANSARA, I .
CALPHAD-COMPUTER COUPLING OF PHASE DIAGRAMS AND THERMOCHEMISTRY, 1987, 11 (03) :203-218
[8]   Femtosecond pulsed laser deposition of diamond-like carbon thin films for tribological applications [J].
Garrelie, F ;
Loir, AS ;
Donnet, LC ;
Rogemond, F ;
Le Harzic, R ;
Belin, M ;
Audouard, E ;
Laporte, P .
SURFACE & COATINGS TECHNOLOGY, 2003, 163 :306-312
[9]  
GARRELIE F, 2002, SPIE P, V4760, P301
[10]   Structure and composition of carbon-nitride films grown by sub-ps PLD [J].
Geretovszky, Z ;
Kántor, Z ;
Szörényi, T .
APPLIED SURFACE SCIENCE, 2003, 208 :547-552