High-efficiency conversion of sputtered Ti thin films into TiO2 nanotubular layers

被引：47

作者：

Berger, Steffen ^{[1
]}

Macak, Jan M. ^{[1
]}

Kunze, Julia ^{[1
]}

Schmuki, Patrik ^{[1
]}

机构：

[1] Univ Erlangen Nurnberg, Inst Surface Sci & Corros LKO, Dept Mat Sci, D-91058 Erlangen, Germany

来源：

ELECTROCHEMICAL AND SOLID STATE LETTERS | 2008年 / 11卷 / 07期

关键词：

D O I：

10.1149/1.2908199

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

The growth of TiO2 nanotubular layers on sputter-deposited Ti thin films was investigated in glycerol/NH4F electrolytes. The growth morphology, the kinetics of tube growth and particularly the chemical etching rate of the tubes strongly depend on the water concentration. The present work shows that in an optimized electrolyte consisting of high-purity glycerol with small additions of NH4F, regular, smooth-walled TiO2 nanotubes can be grown with high current efficiencies. Therefore, this approach allows the full and highly defined conversion of sputter-deposited Ti substrates into TiO2 nanotube layers at room temperature. (C) 2008 The Electrochemical Society.

引用

页码：C37 / C40

页数：4

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