Thin-film micromirror array for high-brightness projection displays

被引：9

作者：

Hwang, KH ^{[1
]}

Song, YJ ^{[1
]}

Kim, SG ^{[1
]}

机构：

[1] Daewoo Elect, Adv Display & MEMS Res Ctr, Seoul 153023, South Korea

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1998年 / 37卷 / 12B期

关键词：

TMA; projection; display; micromachine; piezoelectric; actuator; mirror;

D O I：

10.1143/JJAP.37.7074

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The thin-film micromirror array (TMA) is a new reflective-type light modulator that uses thin film piezoelectric actuators in conjunction with micromirrors by surface micromachining technology. The TMA optical system is designed based on Schlieren optics and the module is fabricated by a conventional integrated circuit (IC) process. The design of thr TMA has evolved to enhance the optical performance as well as mechanical uniformity and electrical reliability. The hidden actuator design TMA has a fill factor (FF) of over 90% and a module light efficiency (MLE) of 65%. A working prototype of a video graphics array (VGA) format TMA display system with three modules shows more than 7 lumen per walt light efficiency.

引用

页码：7074 / 7077

页数：4