Sol-gel derived (La,Sr)CoO3 thin films on silica glass

被引:21
作者
Kim, BJ [1 ]
Lee, J [1 ]
Yoo, JB [1 ]
机构
[1] Sungkyunkwan Univ, Dept Mat Engn, Suwon 440746, South Korea
关键词
conducting oxide; sol-gel; (La; Sr)CoO3;
D O I
10.1016/S0040-6090(98)01506-5
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
(La-0.5,Sr-0.5)CoO3 (LSCO) films were prepared by a sol-gel method on silica grown by various methods such as thermal oxidation, plasma enhanced chemical vapor deposition (PECVD) and atmospheric pressure chemical vapor deposition (APCVD). Polyvinyl alcohol (PVA) was used as a wetting agent to improve the surface wetting behavior of the LSCO precursor solution onto the silica. The surface wetting of LSCO precursor solution on the silica prepared by PECVD or APCVD was progressively improved with adding PVA in the solution. At 5 wt.% of PVA addition, the surface wetting became uniform and the resulting microstructure of the crystallized LSCO films was homogeneous. Crystallization and densification of the LSCO films were improved by modifying the heating rate during crystallization. Dense and uniform LSCO films were obtained with a ramp rate of 2 degrees C/min to 400 degrees C for pyrolysis of PVA, followed by heating with a ramp rate of 10 degrees C/min to crystallization temperatures. (C) 1999 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:13 / 17
页数:5
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