Modeling considerations for rigorous boundary element method analysis of diffractive optical elements

被引：8

作者：

Bendickson, JM

Glytsis, EN

Gaylord, TK ^{[1
]}

Peterson, AF

机构：

[1] Georgia Inst Technol, Sch Elect & Comp Engn, Atlanta, GA 30332 USA

[2] Georgia Inst Technol, Microelect Res Ctr, Atlanta, GA 30332 USA

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION | 2001年 / 18卷 / 07期

关键词：

D O I：

10.1364/JOSAA.18.001495

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Critical modeling issues relating to rigorous boundary element method (BEM) analysis of diffractive optical elements (DOEs) are identified. Electric-field integral equation (EFIE) and combined-field integral equation (CFIE) formulations of the BEM are introduced and implemented. The nonphysical interior resonance phenomenon and thin-shape breakdown are illustrated in the context of a guided-mode resonant subwavelength grating. It is shown that modeling such structures by using an open geometric configuration eliminates these problems that are associated with the EFIE BEM. Necessary precautions in defining the incident fields are also presented for the analysis of multiple-layer DOEs. (C) 2001 Optical Society of America.

引用

页码：1495 / 1506

页数：12

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