SAW Sensors for Harsh Environments

被引：81

作者：

Wolff, Ulrich ^{[1
]}

Dickert, Franz Ludwig ^{[2
]}

Fischerauer, Gerhard K. ^{[1
]}

Greibl, Wolfgang ^{[2
]}

Ruppel, Clemens C. W. ^{[1
]}

机构：

[1] EPCOS AG, SAW Components Div, D-81617 Munich, Germany

[2] Univ Vienna, Inst Analyt Chem, A-1090 Vienna, Austria

来源：

IEEE SENSORS JOURNAL | 2001年 / 1卷 / 01期

关键词：

Chemosensors; coatings; detection limit; high-temperature; instrumentation; resolution; selectivity; sensing mechanisms; sensitivity; sensor materials; surface acoustic waves; torque;

D O I：

10.1109/JSEN.2001.923583

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Surface acoustic wave (SAW) sensors are rugged components made on highly stable substrate materials. In addition, by their operating principle they lend themselves to wireless readout by radio signals. For these reasons, they are a first choice for sensing in harsh environments. A review is given on SAW device design, instrumentation of sensor systems, and on the physical interactions underlying sensing mechanisms. Recent progress in chemical as well as physical sensing toward various applications, e.g., in pollution control, biomedicine, and industry, is highlighted.

引用

页码：4 / 13

页数：10

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