Fabrication of nanoring arrays by sputter redeposition using porous alumina templates

被引：160

作者：

Hobbs, KL ^{[1
]}

Larson, PR ^{[1
]}

Lian, GD ^{[1
]}

Keay, JC ^{[1
]}

Johnson, MB ^{[1
]}

机构：

[1] Univ Oklahoma, Dept Phys & Astron, Ctr Semicond Phys Nanostruct, Norman, OK 73019 USA

来源：

NANO LETTERS | 2004年 / 4卷 / 01期

关键词：

D O I：

10.1021/nl034835u

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Ordered arrays of Au, Ni, and Si nanorings have been fabricated using Ar+ sputter redeposition of material in a porous alumina mask. Typical ring dimensions are 50 nm inner diameter and 10-15 nm wall thickness with heights ranging from 50 to 200 nm. Ring composition was confirmed by electron microscopy. Ring diameter, height, and spacing are controllable by varying the process conditions. This process is scalable and parallel, so that highly ordered nanorings over millimeter-sized regions are possible.

引用

页码：167 / 171

页数：5

共 20 条

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