Novel large-area high-resolution-transmission-electron-micrscopy technique using specimens fabricated by a focused ion beam apparatus

被引：4

作者：

Suematsu, H ^{[1
]}

Udo, K

Hisatsune, K

Yatsui, K

Yamauchi, H

机构：

[1] Tokyo Inst Technol, Mat & Struct Lab, Yokohama, Kanagawa 2268503, Japan

[2] Nagaoka Univ Technol, Extreme Energy Dens Res Inst, Nagaoka, Niigata 9402188, Japan

[3] Nagasaki Univ, Dept Dent Mat Sci, Nagasaki 8528588, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2001年 / 40卷 / 2B期

关键词：

LA-HRTEM observation; FIB; EDS; chemical analysis;

D O I：

10.1143/JJAP.40.1100

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A novel large-area high-resolution-transmission-electron-microscopy (LA-HRTEM) specimen fabrication technique using a focused ion beam (FIB) apparatus was developed. Using this technique, the cation composition in a K-Al-Si-Sn-Ti-Zr-O specimen was analyzed by energy dispersive X-ray spectroscopy (EDS). The cation composition of regions located more than 200 nm away from the interface between a ZrO2 grain and SiO2 matrix was the same as that in ZrO2 and SiO2. This indicates that the accuracy of EDS analyses in the LA-HRTEM specimens was confirmed.

引用

页码：1100 / 1103

页数：4

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