In this work, micromachining technologies are used in the development of the next generation of precision mu-EFFF separation systems. Current macro-machining techniques are the limiting factor in the development of more effective Electrical Field- Flow Fractionation (EFFF) separation systems. EFFF systems are used to separate particles in colloids such as cells or proteins. In this paper, EFFF systems are compared to other separation systems and a review of past micromachining efforts in the area of separation systems is made. The theory behind the operation and resolution of an EFFF system is surveyed and the advantages to be gained from application of micromachining technologies are discussed. A method of fabrication that relies on micromachining technologies for mu-EFFF system construction is described. The mu-EFFF system setup is described, devices are tested, compared to the current macro EFFF systems, and the results reported.