Growth, structure, and mechanical properties of transition metal carbide superlattices

被引：11

作者：

Högberg, H

Birch, J

Odén, M

Malm, JO

Hultman, L

Jansson, U

机构：

[1] Uppsala Univ, Angstrom Lab, Dept Inorgan Chem, SE-75121 Uppsala, Sweden

[2] Linkoping Univ, Dept Phys, Thin Film Phys Div, SE-58183 Linkoping, Sweden

[3] Linkoping Univ, Dept Mech Engn, Div Engn Mat, SE-58183 Linkoping, Sweden

[4] Lund Univ, Dept Inorgan Chem, Natl Ctr HREM, SE-22100 Lund, Sweden

来源：

JOURNAL OF MATERIALS RESEARCH | 2001年 / 16卷 / 05期

基金：

瑞典研究理事会;

关键词：

D O I：

10.1557/JMR.2001.0182

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Superlattices of TiC/VC have been deposited on MgO(001) substrates by simultaneous direct current metal magnetron sputtering and C-60 evaporation in the temperature range 200-800 degreesC. Thin superlattices (approximately 1000 Angstrom) deposited at 400 degreesC exhibited an epitaxial growth with abrupt interfaces while films deposited at 200 degreesC showed a partial loss of epitaxy. At 800 degreesC roughening by surface diffusion started to degrade the superlattices and introduced a columnar microstructure. A loss of epitaxy was observed for thicker (> 7000 Angstrom) superlattice films deposited at 400 degreesC. The results suggest that this observation is due to difficulties in depositing epitaxial VC.

引用

页码：1301 / 1310

页数：10

共 23 条

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