High coercivity ferrite thin-film tape media for perpendicular recording

被引:10
作者
Yamamoto, S
Hirata, K
Kurisu, H
Matsuura, M
Doi, T
Tamari, K
机构
[1] Yamaguchi Univ, Fac Engn, Ube, Yamaguchi 7558611, Japan
[2] Toda Kogyo Corp, Div Res & Dev, Otake 7390652, Japan
关键词
ECR sputtering; ferrite thin-film; perpendicular magnetic recording media; perpendicular magnetic anisotropy;
D O I
10.1016/S0304-8853(01)00372-9
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Reactive sputtering using an electron-cyclotron-resonance microwave plasma was introduced to prepare ferrite thin-film media at substrate temperatures lower than 150 degreesC without oxidation process after their deposition. The ferrite thin-films deposited on glass substrates had perpendicular magnetic anisotropy, high coercivity of about 3000 Oe and very smooth surface. The ferrite thin-films deposited on organic flexible film substrates such as polyimide and PET films also showed perpendicular magnetic anisotropy and high coercivity of 1700-2000 Oe. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:342 / 346
页数:5
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