Transition metal oxide films prepared by pulsed laser deposition for atomic beam detection

被引:48
作者
Tanaka, M
Mukai, M
Fujimori, Y
Kondoh, M
Tasaka, Y
Baba, H
Usami, S
机构
[1] Laboratory of Applied Physics, Faculty of Engineering, Yokohama National University, Yokohama 240, 156 Tokiwadai, Hodogaya-ku
关键词
atomic and molecular beam studies; laser ablation; nickel oxide; cobalt oxide;
D O I
10.1016/0040-6090(96)08673-7
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Resistivity of sintered metal oxides is known to change as a result of irradiation of atomic hydrogen, deuterium, nitrogen, and oxygen, but not as a result of irradiation of symmetrical diatomic molecules of these atoms. Thin films of nickel oxide, cobalt oxide and manganese oxide were formed by pulsed-laser deposition so as to enhance the sensitivity to atomic beams. The 4th harmonic of the Nd:YAG laser (gamma=266 nm, 4.8 J cm(-2)) was focused on sintered pellets, and thin films were deposited on pyrex glass substrates. The partial pressure of the oxygen gas, P-O2, and the substrate temperature, T-s, are crucial parameters for the formation of transparent monoxide-like films. Optimum conditions were determined in the range of P-O2=1.3X10(-4)-1.3X10 Pa and T-s=400-600 degrees C. The films were characterized by X-ray photoelectron spectroscopy and X-ray diffraction. The monoxide-like films are found to be more sensitive to atomic beams than sintered oxides and even NiO single crystals.
引用
收藏
页码:453 / 456
页数:4
相关论文
共 16 条
  • [1] X-RAY PHOTOEMISSION STUDY OF INTERACTION OF OXYGEN AND AIR WITH CLEAN COBALT SURFACES
    BRUNDLE, CR
    CHUANG, TJ
    RICE, DW
    [J]. SURFACE SCIENCE, 1976, 60 (02) : 286 - 300
  • [2] ELECTRICAL-PROPERTIES AND CATION VALENCIES IN MN3O4
    DORRIS, SE
    MASON, TO
    [J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1988, 71 (05) : 379 - 385
  • [3] NACL-TYPE OXIDE-FILMS PREPARED BY PLASMA-ENHANCED METALORGANIC CHEMICAL-VAPOR-DEPOSITION
    FUJII, E
    TOMOZAWA, A
    FUJII, S
    TORII, H
    HATTORI, M
    TAKAYAMA, R
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1993, 32 (10A): : L1448 - L1450
  • [4] ATOMIC-BEAM DETECTION WITH SINTERED METAL-OXIDES
    FUJIMORI, Y
    KUME, S
    USAMI, S
    [J]. APPLIED SURFACE SCIENCE, 1993, 70-1 : 351 - 354
  • [5] FUJIMORI Y, IN PRESS JPN J APPL
  • [6] FUJIMORI Y, 1995, THESIS YOKOHAMA NATL
  • [7] SEMICONDUCTOR DETECTOR FOR THE SELECTIVE DETECTION OF ATOMIC-HYDROGEN
    HARVEY, KC
    FEHRENBACH, C
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1983, 54 (09) : 1117 - 1120
  • [8] X-RAY-PHOTOELECTRON SPECTROSCOPIC STUDIES OF ELECTRONIC-STRUCTURE OF COO
    KIM, KS
    [J]. PHYSICAL REVIEW B, 1975, 11 (06): : 2177 - 2185
  • [9] KOTULA PG, 1993, AIP C P, V288, P231
  • [10] MCINTYRE NS, 1983, PRACTICAL SURFACE AN, P413